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羅茨水環真空機組

型號 泵型號 抽氣速率 極限壓力 電機功率
主泵 前級泵 主泵 前級泵
L/s Pa Torr
ZJPS30-1 JZP30 SK1.5B
30 3*102 2.25 1.1 4
JZPS70-1 JZP70 2SK3
70 3*102 2.25 1.1 7.5
JZPS150-2 JZP150 2SK6A
150 3*102 2.25 2.2 11
JZPS300-1 JZP300 SKA12
300 3*102 2.25 4 22
JZPS600-1 JZP600 SKA25
600 3*102 2.25 7.5 37
JZPS70-1 JZP70 JZP30 SK1.5B 70 100 0.75 1.1 1.1 4
JZPS150-21 JZP150 JZP70 2SK3 150 40 0.3 2.2 1.1 7.5
JZPS300-21 JZP300 JZP150 2SK6A 300 40 0.3 4 2.2 11
JZPS600-21 JZP600 JZP300 SKA12 600 40 0.3 7.5 4 22
JZPS1200-21 JZP1200A JZP600 SKA25 1200 40 0.3 11 7.5 37
JZPY30-1 JZP30 YK1.5A
30 100 0.75 1.1 4
JZPY70-1 JZP70 2YK3
70 80 6*10-1 1.1 7.5
JZPY150-1 JZP150 2YK6A
150 80 6*10-1 2.2 11
JZPY300-1 JZP300 YK12A
300 80 6*10-1 4 22
JZPY6001 JZP600 YK25A
600 80 6*10-1 7.5 37
JZPY70-21 JZP70 JZP30 YKA1.5 70 4 3*10-2 1.1 0.75 4
JZPY150-21 JZP150 JZP70 2KY3 150 0.8 6*10-3 2.2 1.1 7.5
JZPY300-21 JZP300 JZP150 2YK6A 300 0.8 6*10-3 4 2.2 11
JZPY600-21 JZP600 JZP300 YK12A 600 0.8 6*10-3 7.5 4 22
JZPY1200-21 JZP1200A JZP600 YK25A 1200 0.8 6*10-3 11 7.5 37
JZPY600-411 JZP600 JZP150 2H70A 2KY6A 600 1*10-2 8*10-1 8*10-5 6*10-3 7.5 2.2 7.5 11

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